MECHENG 735 : MEMS and Microsystems

Engineering

2024 Semester Two (1245) (15 POINTS)

Course Prescription

Introduction to working principles and fabrication of MEMS/microsystems such as microsensors, microactuators, microfluidics, etc. Exposure to engineering design principles including engineering mechanics, fluidics, materials, etc. at microscale. Exposure to microfabrication processes as part of a laboratory component.

Course Overview

Microelectromechanical systems (MEMS) are miniaturised machines and devices that typically exploit the capabilities of microelectronic fabrication. This course gives an overview of the working principles, fabrication methods and applications encountered with the world of MEMS including:

Scaling of forces at the microscale
The relative importance of surface and body forces at the micro-scale and how this influences methods of sensing and actuation.

Microfluidics
Physical principles behind manipulation of fluids at the micro-scale, and applications such as inkjet printing and point of care diagnostics.

Materials for MEMS devices
An overview of materials typically used in MEMS devices, both as structural materials and for functional elements in sensor and actuator design.

Mechanics in MEMS devices
The static and dynamic mechanical principles behind a number of MEMS devices, and how this is can be measured as an electrical signal.

Fabrication techniques for MEMS and microsystems
An overview of typical micromachining technology used in the fabrication of MEMS devices, together with other emerging technologies used.

Microscale sensor and actuator design and integration
Design principles for integrating the individual working elements of MEMS devices into a complete useable package.

This course shares lectures and other content with MECHENG 728; completing this course will prevent future enrolments in MECHENG 728.

Course Requirements

Prerequisite: MECHENG 325 Restriction: MECHENG 728

Capabilities Developed in this Course

Capability 3: Knowledge and Practice
Capability 4: Critical Thinking
Capability 5: Solution Seeking

Learning Outcomes

By the end of this course, students will be able to:
  1. Understand How standard mechanics and dynamics work at the microscale, and how this needs to be considered in microsystem design, and how it can be exploited (Capability 3.1, 3.2, 4.1 and 4.2)
  2. Analyse Microscale fluid flow in the context of microfluidics. Understand the working principles behind a number of common microfluidic applications. (Capability 3.1, 3.2, 4.1, 4.2 and 5.1)
  3. Understand the structural and dynamic principles behind the operation of microscale MEMS actuators and sensors (Capability 3.1, 3.2, 4.1 and 4.2)
  4. Understand the relevant materials used in typical MEMS applications, and how they are processed to form working devices (Capability 3.1, 3.2, 4.1 and 4.2)
  5. Explain the common processing routes for microscale devices, and understand how the processes can be used in conjunction with each other to fabricate full devices. (Capability 3.1, 3.2, 4.1 and 4.2)
  6. Understand how the mechanical transduction of microscale devices can be either recorded or controlled by appropriate electrical signals (Capability 3.1, 3.2, 4.1 and 4.2)

Assessments

Assessment Type Percentage Classification
Laboratory Assignments 50% Individual Coursework
Final Exam 50% Individual Examination
Assessment Type Learning Outcome Addressed
1 2 3 4 5 6
Laboratory Assignments
Final Exam

Students must sit the exam to pass the course. Otherwise, a DNS (fail) result will be returned.

Workload Expectations

This course is a standard 15 point course and students are expected to spend 10 hours per week involved in each 15 point course that they are enrolled in.

For this course, you can expect 36 hours of lectures, 36 hours of reading and thinking about the content and  78 hours of work on assignments and/or exam preparation.

Delivery Mode

Campus Experience

Attendance is required at scheduled activities including labs to receive credit for components of the course.
Lectures will be available as recordings. Other learning activities including labs will not be available as recordings.
The activities for the course are scheduled as a standard weekly timetable.

Learning Resources

Course materials are made available in a learning and collaboration tool called Canvas which also includes reading lists and lecture recordings (where available).

Please remember that the recording of any class on a personal device requires the permission of the instructor.

Health & Safety

Students must ensure they are familiar with their Health and Safety responsibilities, as described in the university's Health and Safety policy.

Student Feedback

At the end of every semester students will be invited to give feedback on the course and teaching through a tool called SET or Qualtrics. The lecturers and course co-ordinators will consider all feedback and respond with summaries and actions.

Your feedback helps teachers to improve the course and its delivery for future students.

Class Representatives in each class can take feedback to the department and faculty staff-student consultative committees.

Not enough student responses were received in 2023.

Academic Integrity

The University of Auckland will not tolerate cheating, or assisting others to cheat, and views cheating in coursework as a serious academic offence. The work that a student submits for grading must be the student's own work, reflecting their learning. Where work from other sources is used, it must be properly acknowledged and referenced. This requirement also applies to sources on the internet. A student's assessed work may be reviewed for potential plagiarism or other forms of academic misconduct, using computerised detection mechanisms.

Class Representatives

Class representatives are students tasked with representing student issues to departments, faculties, and the wider university. If you have a complaint about this course, please contact your class rep who will know how to raise it in the right channels. See your departmental noticeboard for contact details for your class reps.

Inclusive Learning

All students are asked to discuss any impairment related requirements privately, face to face and/or in written form with the course coordinator, lecturer or tutor.

Student Disability Services also provides support for students with a wide range of impairments, both visible and invisible, to succeed and excel at the University. For more information and contact details, please visit the Student Disability Services’ website http://disability.auckland.ac.nz

Special Circumstances

If your ability to complete assessed coursework is affected by illness or other personal circumstances outside of your control, contact a member of teaching staff as soon as possible before the assessment is due.

If your personal circumstances significantly affect your performance, or preparation, for an exam or eligible written test, refer to the University’s aegrotat or compassionate consideration page https://www.auckland.ac.nz/en/students/academic-information/exams-and-final-results/during-exams/aegrotat-and-compassionate-consideration.html.

This should be done as soon as possible and no later than seven days after the affected test or exam date.

Learning Continuity

In the event of an unexpected disruption, we undertake to maintain the continuity and standard of teaching and learning in all your courses throughout the year. If there are unexpected disruptions the University has contingency plans to ensure that access to your course continues and course assessment continues to meet the principles of the University’s assessment policy. Some adjustments may need to be made in emergencies. You will be kept fully informed by your course co-ordinator/director, and if disruption occurs you should refer to the university website for information about how to proceed.

Student Charter and Responsibilities

The Student Charter assumes and acknowledges that students are active participants in the learning process and that they have responsibilities to the institution and the international community of scholars. The University expects that students will act at all times in a way that demonstrates respect for the rights of other students and staff so that the learning environment is both safe and productive. For further information visit Student Charter https://www.auckland.ac.nz/en/students/forms-policies-and-guidelines/student-policies-and-guidelines/student-charter.html.

Disclaimer

Elements of this outline may be subject to change. The latest information about the course will be available for enrolled students in Canvas.

In this course students may be asked to submit coursework assessments digitally. The University reserves the right to conduct scheduled tests and examinations for this course online or through the use of computers or other electronic devices. Where tests or examinations are conducted online remote invigilation arrangements may be used. In exceptional circumstances changes to elements of this course may be necessary at short notice. Students enrolled in this course will be informed of any such changes and the reasons for them, as soon as possible, through Canvas.